Patterned Metallization for Hybrid Metal-Semiconductor Mirror of High Reflectivity

Technology #ua17-092

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Patrick Gbele
Graduate Student, Optical Science
Jerome Moloney
Professor, Optical Sciences
Alexandre Laurain
Assistant Research Professor, Optical Sciences
Managed By
Amy Phillips
Sr. Licensing Manager (520) 621-9579

Title:  Patterned metallization for hybrid metal-semiconductor mirror of high reflectivity


Invention Summary:  Researchers at the University of Arizona have designed a novel hybrid metal-semiconductor mirror for use with VECSELs.  A novel method of deposition incorporating a patterned mask allows for the use of gold in conjunction with GaAs.  The DBR thickness is reduced, as is the thermal impedance, resulting in high refelectivity and high gain.


Background:  Vertical External Cavity Surface Emitting Lasers (VECSELs) typically have low gain that requires a highly reflective mirror of at least 99.9% reflectivity to be attached to the gain medium.  Most DBR mirrors used for this purpose have a large number of layered pairs of AlGaAs/AlA, and at longer wavelengths, the materials are changed to InP-based materials.  They are still thick and thus have high thermal impedance.



*  Reduced thermal impedance and higher gain

*  Increased power efficiency

*  Covers both the pump and the laser signal wavelengths



*  High powered VECSELs

*  Spectroscopy

*  Microwave and Terahertz photonics

*  Medical imaging sources


Contact:  Amy Phillips

refer to case number UA17-092