Invention:
This invention focuses on incorporating diffractive optical elements, like a Fresnel zone plate, into the semiconductor fabrication process, particularly in the back-end-of-line (BEOL) stage. By doing so, it enhances the functionality of semiconductor devices by enabling advanced imaging and spectroscopic capabilities directly on the chip. This approach is cost-effective and scalable, compatible with existing fabrication techniques, and can be applied to a wide range of fields including biomedical imaging, optical communications, and remote sensing. A key feature of this technology is its ability to exploit chromatic aberration to focus specific wavelengths of light onto a detector, while blocking others, effectively turning it into a spectral filter. This allows a single optical element to serve multiple functions, such as focusing light and filtering colors, making it ideal for applications like hyperspectral imaging. The invention’s design is adaptable to the constraints of semiconductor foundry rules, ensuring it can be easily integrated into large-scale production processes.
Background:
This technology addresses the challenge of integrating advanced optical functionalities, like imaging and spectroscopy, directly onto semiconductor chips without the need for bulky external optics. Current solutions often rely on separate optical components, which add complexity, cost, and space, making them less practical for miniaturized devices like those used in biomedical imaging, remote sensing, or optical communications. Additionally, traditional lenses and filters used in these applications are often not compatible with semiconductor fabrication techniques, limiting their scalability and integration. Unlike current technologies, this invention leverages diffractive optical elements, such as Fresnel zone plates, which can be seamlessly incorporated into semiconductor foundry processes. By exploiting chromatic aberration, it can focus specific wavelengths of light while blocking unwanted ones, combining the roles of a lens and a color filter in a single element. This reduces the need for multiple components, allowing for smaller, more efficient devices. The design is also compatible with standard foundry rules, ensuring it can be produced at scale with lower costs and higher efficiency than conventional optical systems.
Applications:
- Advanced imaging
- Spectroscopy
- Biomedical imaging
- Optical communications
- Remote sensing
Advantages:
- Reduces the need for external optical components, allowing for smaller, more compact devices
- Cost effective
- Scalable
- Uses diffractive optics to focus light
- Single optical element can serve many functions
