MEMS-Based Hybrid Beam Steering for LIDAR

Case ID:

This technology is a LiDAR (light detection and ranging) beam steering system designed to increase scanning range while keeping quality resolution using a microelectromechanically (MEMS) controlled mirror. This allows a single focused beam to be reflected over multiple angles, greatly increasing the possible scanning range. The mirror is specially designed to maintain the resolution of the beam over these many angles.



LiDAR sensing for autonomous vehicles is undergoing a huge amount of research and development to bring down costs and product size, while keeping image resolution up to par with industry standards. MEMS is a popular solution because it allows for more manipulation over the mirrors in the sensor but doesn’t add much weight since small chips and circuit boards are used. This technology integrates a specially designed mirror for image resolution with a MEMS system, to address resolution problems while also keeping a small frame and low cost.



  • Environmental mapping
    • Autonomous vehicles
    • Industrial metrology/Robotic guidance in manufacturing
    • Remote sensing


  • Keeps resolution of a single collimated beam
  • Reflects beam over a much wider angle than other MEMS LiDARs on the market
  • Has an optimized timing system for the MEMS control of the reflecting mirror
Patent Information:
Contact For More Information:
Richard Weite
Senior Licensing Manager, College of Optical Sciences
The University of Arizona
Lead Inventor(s):
Yuzuru Takashima
Brandon Hellman
Joshua Rodriguez
Young Kim